Physical Vapor Desposition Tool

Uploader: Saril Raghu

Original upload date: Sun, 19 Apr 2009 00:00:00 GMT

Archive date: Sat, 04 Dec 2021 16:36:49 GMT

This is an animation of a generic PVD tool to deposit copper onto silicon wafers. The plasma etches tiny copper particles off of the target, which then fall down onto the wafer and adhere on the su
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